Piezo-Resistive Mems Pressure Sensor for Tire Bead Seating Pressure Measurement-Design, Simulation, Analysis and Fabrication Process

Abstract

Understanding the tire behavior during tire inflation is critical to design a high- performance tire. To improve handling and response, tire manufacturers need to understand the changes of a tire under various conditions. A MEMS pressure sensor can be placed on the rim to make contact with the tire bead, and can measure the pressure distribution of a tire across the sensor face. Considering the unique nature of each sensor and the trade-offs in design, it is not feasible to follow a standard design approach. Thus, it is useful to derive the specific design, considering number of important factors to arrive at the adeal design. The selection of appropriate parameters of piezoresistors such as the shape and the position of the piezoresistor on the pressure sensor diaphragm, thickness of diaphragm are important. This research work shows the scope of using analytical solutions and design techniques for a development of piezoresistive pressure sensor. This research work also focuses on piezoresistive pressure sensor principles, design, modeling, parameters to be considered, materials that can be used in MEMS fabrication. Here the MEMS fabrication process has been discussed in brief pertaining to the application and feature size. Few models of piezoresistive based MEMS pressure sensors have been simulated, analysed and the results are presented.