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https://gnanaganga.inflibnet.ac.in:8443/jspui/handle/123456789/6590
Title: | Mechanical and Structural Characterization of DLC Prepared By PECVD Technique |
Authors: | Champuri Srinivas Rao Leo Prakash |
Issue Date: | 2019 |
Publisher: | Manufacturing Technology Today |
Abstract: | Diamondlike carbon (DLC) films have been explored extensively in the past due to their highly attractive properties. However, the high level of internal stress developed during growth, calls for stress relieving process where structural and mechanical properties changes takes place. In the present study, the DLC is deposited on Si substrate using PECVD process and mechanical and structural changes during the post heat treatment process of DLC are investigated by using nanoindentation and Raman spectroscopy. Increase in hardness value confirmed the conversion of sp2 to sp3 structure while heat treatment. |
URI: | http://gnanaganga.inflibnet.ac.in:8080/jspui/handle/123456789/6590 |
Appears in Collections: | Articles to be qced |
Files in This Item:
File | Size | Format | |
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MECHANICAL AND STRUCTURAL CHARACTERIZATION.pdf Restricted Access | 1.48 MB | Adobe PDF | View/Open Request a copy |
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