Micro Capacitive Pressure Sensor Using Polymumps Process

Abstract

The work presented in this paper involves design, analysis and simulation of micro fixed-fixed beam as a capacitive pressure sensor which is designed by using PolyMUMPs- Polysilicon Multi User MEMS Process. By applying a pressure on the top of fixed-fixed beam, the mechanical force pulls the beam down and increases the capacitance. The change in length of the beam influences the range of applied pressure while the effect of beam width on this is negligible. The PolyMUMPs was developed by MEMSCAP foundry focusing on the fabrication, reliability and cost effectiveness. This presented MEMS pressure sensor is capable of measuring pressure between 0.1MPa to 1.7 MPa which is useful in various field of applications.