Fabrication of Controlled Varying Depth 3D Microstructures Using Bulk Lithography

Abstract

This paper presents fabrication of 3D microstructures in single-pass scanning of laser beam over the photopolymer resin of unconstraint depth. In the proposed method, laser energy exposure, being one of the important parameters affecting cured depth, is varied along the line scan to enable fabrication of varying depth structure. To achieve the control cured depth, characterization of cured depth in terms of processing parameter is essential. Hence the dependence of cured depth in terms of process parameters is experimental investigated for acrylate based resin. Test structure is fabricated with proposed method to illustrate the capability of the proposed process. 3D microfabrication in single layer scan with lesser fabrication time and potential for high aspect ratio structures are the key features of the proposed method.