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Please use this identifier to cite or link to this item: https://gnanaganga.inflibnet.ac.in:8443/jspui/handle/123456789/7475
Title: Optical Micro-Shadowgraph-Based Method for Measuring Micro-Solderball Height
Authors: Shihua Wang
Chenggen Quan
Issue Date: 2005
Publisher: Optical Engineering
Abstract: An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained.
URI: http://gnanaganga.inflibnet.ac.in:8080/jspui/handle/123456789/7475
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