Effect of laser irradiation on the tribological properties of RF-sputtered nickel oxide (NiO) thin films

Abstract

The present work aims at investigating the effect of laser irradiation on the tribological properties of RF-sputtered NiO thin films deposited on industrial grade aluminum substrate. A semiconductor laser based on Nd:YAG operating at its 4th harmonic wavelength, λ = 266 nm with varying laser fluence and spot size of about 5 μm is irradiated on the NiO film. The localized heating allows for smoothening of the NiO film along with contributions to the changes in the stoichiometry of NiO (reduction of excess oxygen). In particular, the effects of tuning laser fluence and the subsequent tribology tests pertaining to the coefficient of friction variations for tribological tests are discussed.