Fabrication and Dielectric, Structural Analysis on PMN-PT

Abstract

The analysis of commercially available piezoelectric coefficient of mono-crystalline materials such as PMN-PT (Lead Magnesium Niobate - Lead Titanate) helps to broaden the gate for silicon-integrated applications (Piezo-MEMS) becoming more compatible with micro technology batch processes. Further, advances are expected in terms of miniaturization, optimization, functionality or Integration with electronics. Subsequently, operating voltage will be lower and devices response time will improve dramatically. Fabrications of the piezoelectric materials have been performed and analysis on the structure and dielectric has been carried out. This work shows how to improve the dielectric properties for synthesis material.