Please use this identifier to cite or link to this item:
https://gnanaganga.inflibnet.ac.in:8443/jspui/handle/123456789/7475
Title: | Optical Micro-Shadowgraph-Based Method for Measuring Micro-Solderball Height |
Authors: | Shihua Wang Chenggen Quan |
Issue Date: | 2005 |
Publisher: | Optical Engineering |
Abstract: | An optical micro-shadowgraph for the height measurement of a micro-solderball on a semiconductor wafer is proposed. The micro-shadow image resulting from an oblique illumination onto the protruded solderball/bump on the wafer is clearly captured. Experimental investigation shows that accurate solderball height measurement can be readily obtained. |
URI: | http://gnanaganga.inflibnet.ac.in:8080/jspui/handle/123456789/7475 |
Appears in Collections: | Articles to be qced |
Files in This Item:
File | Size | Format | |
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Optical micro-shadowgraph-based.pdf Restricted Access | 1.01 MB | Adobe PDF | View/Open Request a copy |
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